|
|
| |
|
|
Semiconductor Equipment Div
|
|
Semiconductor manufacturing equipment means the equipment for processing semiconductor wafer, which is required for the fabrication of semiconductor devices. They include equipment for wafer processing, inspection and testing. The semiconductor equipment industry is an intensive and highly value added industry, which has short life-cycle. Its average life-cycle is about 3~4years due to a high-speed development of semiconductor technology and a productivity yield which is fundamental to the semiconductor market competition. It is the aggregate integration of electronic, physics, machinery, material etc. It also has far-reaching effect to other industries with ultra high vacuum, ultra high voltage, ultra-clean, ultra-precision obtained through development of new processing techniques and production technology for a semiconductor. With the ever significant growth in the production of very large scale integrated circuit over the past 20 years, the mass production of 64M DRAM(dynamic random access memory) device is available and 1G DRAM(dynamic random access memory) device is expected to be developed in the very near future. For the production of these devices, an intelligent design as well as the process technology should be supported. A plasma based technique is used in etching, deposition etc. One of the main reasons that the plasma technique is useful in the ULSI (Ultra-large scale integrate) is that the minute patterning of ULSI circuit, with multiple layers and thin film, requires a more sacrificial surface micromachining processes (precision ) and lower-temperature process. Etching is also used in the manufacturing of printed circuit boards and semiconductor devices.Especially, the etching process requires a higher value in fractional anisotropy index, Selectivity and degree of integration is increased as shown the table 1, and no pollution or damage occurs during etching process, as well as low particle on the processes.
|
|
|
|
|
|
|
|
|
|
|
|
|
Industrial Equipment Div
|
|
Vacuum is widely applied to advanced technology industries like Semiconductor, Flat Panel Display, Electronic, new material, metal, genetic engineering, Accelerator, cryogenic engineering technology etc all of which are rapidly growing. Such advanced technology equipment is currently dependent on imports. We are doing our best to supply such equipments and adapting a high vacuum technology to the domestic industries. Except for semiconductor and display equipment markets, the industrial vacuum equipment can be classified as optical industry, Chemical industry, pharmaceutical industry food industry, metal industry etc. The equipment for each division are as follows.
|
|
|
|