::: 캔틸레버(: 외팔보) 타입 전기로 Cantilever Loading Systems Furnace :::

Softlander Cantilever Loading The softlander contact loading offers the possibility of loading and unloading quartz or silicon carbide wafer carriers in the process tube. The advantage is low thermal mass in the process tube and the tight door seal. This is an advantage for processes like POCL3.