새 페이지 1
| "WON-COR" Spin Coater,
스핀코터, 도료 및 기타 코팅제의 균일한 피막
형성용. |
|
Specifications
| 구분 |
LSC 101
|
LSC 102
|
LSC103
|
| Wafer |
piece up to 4" dia
|
piece up to 4" dia
|
piece up to 4" dia
|
| Substrate |
piece up to 3" * 3"
|
piece up to 3" * 3"
|
piece up to 3" * 3"
|
| Chamber Size |
200mm
|
200mm
|
200mm
|
| Speed Range |
up to 4,000rpm
|
up to 4,000rpm
|
up to 4,000rpm
|
| Speed Increment |
100rpm
|
100rpm
|
100rpm
|
| Speed Display |
digital(LED)
|
digital(LED)
|
digital(LED)
|
| Spin Steps |
1
|
2
|
3
|
| Time |
1 to 999.9sec
|
1 to 999.9sec
|
1 to 999.9sec
|
| Vacuum |
-600 mmHg
|
-600 mmHg
|
-600 mmHg
|
| Vacuum Pipe |
4mm ID / 6mm OD
|
4mm ID / 6mm OD
|
4mm ID / 6mm OD
|
| Weight |
27.5kg
|
27.5kg
|
27.5kg
|
| Power |
220V, 50/60 Hz
|
220V, 50/60 Hz
|
220V, 50/60 Hz
|
| Dimensions(L*H*D) |
300*350*450 mm
|
300*350*450 mm
|
300*350*450 mm
|
* All specifications are subject to change without notice
| CAT No. |
Description |
단위/갯수 |
Price(VAT별도) |
|
가격문의 |
|
